总览
AP Tech，也称为高级压力技术，是气体处理部件的制造商，主要是压力调节器和阀门。 AP Tech的长处是通过超高纯度应用提供高纯度特种气体的产品。从源容器到使用点，再到处理工具或设备本身，*，AP Tech产品可提供质量，性能和可靠性不受影响的气体。该公司为服务和支持设定了终标准，这些特征现已成为AP Tech品牌的代名词。
各种各样的气体输送产品可满足大多数应用。从腐蚀性气体源面板的挑战到工艺使用点所需的精细控制，AP Tech产品在压力下均可提供高性能。
该公司由行业人士Rene Zakhour于1987年成立。他的目标是制造以服务和支持为后盾的可靠产品。如今，AP Tech现已成为我们半导体和电子行业主要市场的*，在他的下，并在他的工作中追求的敦促下，我们继续努力实现Rene的目标。就这么简单。
美国APTECH调节器AZ 1000系列毕尔途专业高
压力调节器
AP Tech的各种调节器的入口压力范围高达10,000 psig（690 bar），输送压力从压力到10,000 psig（690 bar）。流量也有很大的范围，从几sccm到数千slpm。无论是手动弹簧加载还是气动驱动，连接尺寸为1/8英寸至1英寸，AP Tech都是通过超高纯气体输送实现高纯度的优选调节器。
Operating Parameters
Source pressure vacuum to 3,500 psig (241 bar)
AZ 1001 and TF option vacuum to 300 psig (21 bar)
Delivery pressure AZ 1001 1 to 10 psig (0.07 to 0.7 bar)
AZ 1002 1 to 30 psig (0.07 to 2 bar)
AZ 1006 2 to 60 psig (0.14 to 4 bar)
AZ 1010 2 to 100 psig (0.14 to 7 bar)
AZ 1015 5 to 150 psig (.34 to 10 bar)
AZ 1030 5 to 300 psig (.34 to 21 bar)
Proof pressure 150% of operating pressures
Burst pressure 300% of operating pressures
SS 316L construction
• 10 µin. surface finish(25 µin. optional)
• Vacuum to 3500 psig(241 bar) inlet
• 1 to 300 psig (0.07 to 21bar) outlet
• Cleaned, assembled and packaged for high purity semiconductor applications
• Flow rates- Standard to 30 slpm - HF option to 120 slpm
• Regulator of choice for point of use applications
• Knob LOTO (refer to AP KL data sheet)
• Installation and operating instructions available at
美国APTECH调节器AZ 1000系列毕尔途专业高
in the Tech Briefs section
Other Parameters
Inlet/outlet connectors 1/4 or 3/8 inch face seal or tube weld
Flow coefficient (Cv) 0.09 (0.15 HF option)
Internal volume 0.49 in3 (8 cm3)
Operating temperature -40° to +160°F (-40° to +71°C)*
Surface finish 10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
Inboard leakage 2 x 10-10 sccs
Outboard leakage 2 x 10-9 sccs He
Leakage across seat 4 x 10-8 sccs He
Installation surface or panel (optional)
Supply pressure effect 0.25 psig per 100 psig source pressure change
HF 0.75 psig per 100 psig source pressure change
材质：316不锈钢
Sample Order Number AZ 1010SQ 2PW FV4 FV4
AZ1010S3PWFV4MV40
AZ1010S2PWFV4MV4
AZ1010S 2PW FV4 MV4
AZ 1010 | Series
AZ 1001 = 1-10 psig (.07 to .7 bar)
AZ 1002 = 1-30 psig (.07 to 2 bar)
AZ 1006 = 2-60 psig (.14 to 4 bar)
AZ 1010 = 2-100 psig (.14 to 7 bar)
AZ 1015 = 5-150 psig (.34 to 10 bar)
AZ 1030 = 5-300 psig (.34 to 21 bar)
S | Material
S = Stainless steel (SS)
SHP = SS/Ni-Cr-Mo alloy poppet and
S diaphragm
Q | Surface
Finish Option
Q = 25 µin. Ra avg.
2PW | Ports
2PW = 2 ports butt weld
3PW = 3 ports butt weld
4PW = 4 ports butt weld
FV4 FV4 | Connections
Inlet / Outlet
FV4 = 1/4 inch face seal female
MV4 = 1/4 inch face seal male
FV6 = 3/8 inch face seal female
MV6 = 3/8 inch face seal male
Tube weld stub available
Delivery
Gauge*
0 = No gauge
V3 = 30-0-30 psig/bar
L = 30-0-60 psig/bar
1 = 0-100 psig/bar
H = 30-0-160 psig/bar
4 = 0-400 psig/bar
10 = 0-1000 psig/bar
40 = 0-4000 psig/bar
* Standard gauge port is 1/4 inch face seal male
(1/4 inch face seal female are available).
Options
VS = Polyimide seat
TF = PTFE seat
HF = High flow
P = Panel installation**
KL = Knob LOTO (refer to AP KL data sheet)
** Panel hole 1.569 diameter.
   点击图片查看原图 |
|
|||||||||||||||||
详细信息
